Change ESRF URLs query key from `data_path` to `path`

ESRF URLs are using data_path for storing the HDF5 entry. (see https://gitlab.esrf.fr/tomotools/tomoscan/-/blob/master/tomoscan/esrf/identifier/url_utils.py#L36) Using path instead would make the URL compatible with silx.io.url.DataUrl. This would allow to open those URL's str representation with silx view.